FabViewer is a new module in IntelliSense’s Clean Room suite of process simulation and visualization tools. After building up a process flow in IntelliFab, users can visualize the process simulation and final MEMS device in FabViewer. High-resolution JPEGs and movie files are easy to export for use in technical papers and presenations. A dynamic cross-sectioning feature allows for easy process debugging or failure analyses. Shown below is a cross-section of a device constructed with FabViewer.
In “A Novel Design Methodology for MEMS Device“, a paper submitted to the 2007 IEEE Conference on
Micropump modeled in IntelliFAB.
Nanotechnology, researchers from Nankai University discuss virtual modeling and simulation of MEMS devices. As part of the paper, the group uses the IntelliFab/FabViewer module of IntelliSense’s Clean Room package to simulate the fabrication process of a thermally-actuated micropump. The figure on the right shows the entire device including the bimetallic membrane and microvalves.
Shown below is the process flow used to construct the bimetallic membrane of the micropump. The bimetallic strip is electro-thermally actuated (passing a current heats up the bimetallic strip causing the membrane to deflect up and down). The group also plans to substitute the bimetallic actuator with a piezoelectric actuator.
