Students at UC-Santa Cruz will be designing and fabricating MEMS devices in an upcoming Intro to MEMS Design course taught by Prof. Joel Kubby. The students wil use IntelliSuite to design and model their MEMS devices.
Prof. Kubby is currently looking for industry sponsors who will specify the device to be fabricated and will have access to student papers and presentations describing the device design. For more information, contact Prof. Kubby at jkubby@soe.ucsc.edu.
Researchers at the University of Cambridge recently used IntelliSuite to assist with the design of a micromachined electrostatic charge sensor. The group used IntelliSuite to simulate various designs of the device and determine which design would give them the desired resonant frequency. An SEM of the variable capacitor used in the device is shown below.
SEM of variable capacitor
The paper, “A Resonant Micromachined Electrostatic Charge Sensor”, is part of the September 2008 edition of the IEEE Sensors Journal and can be downloaded here.
From one of our favorite professors and MEMS personalities– Dr Pisano. Albert’s lectures are now available on the iTunes University Podcast program.
