Introducing IntelliEtch

IntelliEtch is a brand-new atomistic etch simulator with several powerful capabilities. Users can take into account ab initio effects and predict evolving surface morphologies. Wet and dry etching can be performed on high order planes or non-flat substrates. An etched structure can also be exported as an FEA model for further analysis. The figure below shows the development of silicon microneedles in IntelliEtch compared with experimental SEMs. This model demonstrates several of IntelliEtch’s advanced capabilities, including multi-step mask transfers and wet/dry combination etching.

Nankai University’s application of Clean Room

In “A Novel Design Methodology for MEMS Device“, a paper submitted to the 2007 IEEE Conference on

Micropump modeled in IntelliFAB.

Nanotechnology, researchers from Nankai University discuss virtual modeling and simulation of MEMS devices. As part of the paper, the group uses the IntelliFab/FabViewer module of IntelliSense’s Clean Room package to simulate the fabrication process of a thermally-actuated micropump. The figure on the right shows the entire device including the bimetallic membrane and microvalves.

Shown below is the process flow used to construct the bimetallic membrane of the micropump. The bimetallic strip is electro-thermally actuated (passing a current heats up the bimetallic strip causing the membrane to deflect up and down). The group also plans to substitute the bimetallic actuator with a piezoelectric actuator.

Process flow for bimetallic membrane, automatically generated in IntelliSense’s Clean Room process modeling tools.

3D System Visualization in SYNPLE

SYNPLE, IntelliSense’s system-level simulator, includes some major upgrades in the latest version of IntelliSuite. The new bus-based auto-wiring feature makes it easy to wire up multiple elements and create schematics from the bottom, up. Users can also import finite element models to develop complex systems from the top, down.

SYNPLE now allows you to visualize your results in 3D, so that you can visualize the system response including the MEMS and  electronics in 3D. Shown below is an animation of a micromirror modeled in SYNPLE.

We’re proud of the fact that SYNPLE is the first schematic tool specifically designed for MEMS, and we’re currently working hard on more upgrades to be included in IntelliSuite v8.6. Watch out for more new features coming soon!

IntelliSuite v8.5 Official Release

IntelliSuite v8.5 was officially released today! News outlets around the globe have begun picking up the story. Here are links to a few of them:

Small Times

Reuters

I-Micronews

NSTI

Forbes

HPC Wire

Yahoo! Finance

Market Watch

Business Wire

IT Business Net

CNET News

ad-hoc-news.de

TMCnet

FinanzNachrichten.de