In this recent paper in IEEE Electron Device Letters, IntelliSuite is used in the development of a single-crystal-silicon micromechanical resonator.  This bulk-mode resonator was designed to have a Q factor of 1.16 million for high frequency stability at a resonant frequency of 2.18 MHz.   IntelliSuite was used to validate this behavior for the specific resonator design.  Shown below is a schematic of the resonator and a contour plot of the displacement taken from the simulation in IntelliSuite.

Schematic and displacement results for resonator