Researchers at the University of Cambridge recently used IntelliSuite to assist with the design of a micromachined electrostatic charge sensor. The group used IntelliSuite to simulate various designs of the device and determine which design would give them the desired resonant frequency. An SEM of the variable capacitor used in the device is shown below.

SEM of variable capacitor

The paper, “A Resonant Micromachined Electrostatic Charge Sensor”, is part of the September 2008 edition of the IEEE Sensors Journal and can be downloaded here.